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Controlling the polarity of scandium aluminum nitride (ScAlN) piezoelectric thin film via Si addition
Controlling the polarity of scandium aluminum nitride (ScAlN) piezoelectric thin film via Si addition
2021
Sri Ayu Anggraini
Masato Uehara
Kenji Hirata
Hiroshi Yamada
Morito Akiyama
Keywords:
Piezoelectricity
Materials science
piezoelectric thin films
Aluminium
Scandium
Nitride
Composite material
Polarity (physics)
Correction
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