Three-dimensional sphere-like structure for enhancing light extraction efficiency of LED sample, and method for preparing same

The invention is a method for preparing a sphere-like structure. The method comprises the following steps: spin-coating photoresist on a sample, and using a hot plate or a baking oven to prebake the photoresist on the sample; preparing a corresponding mask according to the size and the shape of a pattern to be prepared and on the premise of considering the proximity effect; using an ultraviolet photo-etching machine to expose the sample through an underexposure method and develop the exposed sample; choosing an appropriate temperature to carry out heat flow treatment on the exposed sample to form a three-dimensional sphere-like photoresist structure sample; etching the photoresist structure sample by using a dry etching process so as to transfer the shape of the photoresist to the surface of the sample material; and removing photoresist residue on the surface of the sample by using acetone solution or a resist remover so as to obtain a three-dimensional sphere-like structure. The light extraction efficiency of an LED can be greatly improved when the three-dimensional sphere-like structure is applied to the LED. The invention further provides a three-dimensional sphere-like structure for enhancing the light extraction efficiency of an LED sample.