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Determination of Zr, Y, Gd in zirconium-based targets for magnetron sputtering of thermal protective coatings
Determination of Zr, Y, Gd in zirconium-based targets for magnetron sputtering of thermal protective coatings
2019
F. N. Karachevtsev
R.M. Dvoretskov
Е.A. Miheeva
Keywords:
Sputter deposition
Zirconium
Thermal
Metallurgy
Materials science
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