PZT-actuated, 2D optical scanning image acquisition

An image acquisition utilizing a 2D piezoelectric actuated optical scanner is presented. Fabrication and testing of a micromachined optically transmissive cantilever waveguide that operates in the resonant mode is presented with its application as a micro-optical scanner. The optical waveguide has a smaller cross-sectional area (2 µm × 5 µm) than our previous study (62.5 to 420 mm). The scanner is consisted of a single mode optical fiber (SMF28e) mounted on a X-Y coupled piezoelectric bimorphs operating at the actuators’ resonant frequencies of 50 Hz and 128 Hz. The scanner achieves a 3.14 mm vertical and 0.61 mm horizontal tip displacements with a ±10V input.