Research on Surface Roughness of Die Steel in Micro-Etching

In this study, the 300 µm width micro-channel was manufactured by spray etching method. The surface roughness was analyzed by Laser scanning con-focal microscope. The relationship of the surface roughness and etching factor such as spray etching pressure, mask gap and time had been studied. The results show that the surface roughness increases initially, and then reduces with the size of mask gap. While the roughness increases as the spraying pressure increases. The etching time plays slightly effect on roughness for it has no impact on the etch uniformity as mask gap and spray pressure do.