Micro Injection Moulded MEMS with Integrated Piezoelectric PVDF

Summary: Silicon micro technologies are established as manufacturing processes for micro systems. However, disadvantages of these technologies are restrictions in material choice as well as partially high manufacturing costs. Here an alternative technology for the production of micro systems based on “Multi Component Micro Injection Moulding” is presented. The potential of this technology is emphasized by describing an acceleration sensor with embedded piezoelectric sensor material. In detail, an overview of the technology, used materials, their functionalisation and smart systems integration is given for the use as structural health monitoring system in fibre reinforced thermoplastic components.