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Fabrication of Electron-Beam Excited Plasma Process Reactor with a Polymer Interface
Fabrication of Electron-Beam Excited Plasma Process Reactor with a Polymer Interface
1993
Ryoichi Inanami
Tsuyoshi Naganawa
Chunlin Shao
Shinzo Morita
Keywords:
Electronic engineering
Polymer
Plasma
Cathode ray
Excited state
Computer science
Analytical chemistry
Optoelectronics
Fabrication
Correction
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