A Semi-Empirical Evaluation for Effective Thermal Conductivity of Diamond-Coated Silicon Heat Spreaders

An effective and time-saving method for precisely evaluating the effective thermal conductivities of diamond-coated silicon heat spreader is presented. For the present two-layer (diamond/silicon) composite material, by using both a numerical thermal network method and an experimental measurement together with a statistical least-square technique, the parallel and normal effective thermal conductivities of the anisotropic testing diamond film with a thickness of 6.93 micro-meters are semi-empirically determined as 141W/mK and 1700W/mK, respectively. Furthermore, the present results also show that an isotropic model using the geometric mean of the parallel and normal effective thermal conductivities (489.5W/mK) predicts the local temperature distribution on the diamond-coated surface with a satisfactory agreement.Copyright © 2004 by ASME