Modification and Polishing of the Holographic Diffraction Grating Grooves by a Neutralized Ar Ion Beam

We describe the method for increasing the efficiency of holographic diffraction gratings (HDGs) intended for operation in the X-ray wavelength range. We describe the procedure of processing of HDG surface for reducing the amplitude and roughness of grooves. For reducing the groove amplitude, we have used Xe ions with an energy of 600 eV, while ion polishing was performed with Ar ions having an energy of 800 eV. It is shown that, after ion polishing, the diffraction efficiency of the grating at a wavelength of 4.47 nm increases by almost four times.