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CHARACTERISTICS OF LATERAL CORROSION DURING MESA ETCHING OF SILICON STRUCTURES IN HF-HNO3-CH3COOH COMPOSITIONS
CHARACTERISTICS OF LATERAL CORROSION DURING MESA ETCHING OF SILICON STRUCTURES IN HF-HNO3-CH3COOH COMPOSITIONS
1991
V. I. Gaponenko
S.O. Izidinov
Keywords:
Corrosion
Metallurgy
Etching
Materials science
Silicon
Correction
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