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Adsorption and Self-limiting Mechanisms of Trimethylaluminum and Water on Aluminum Oxide Surface
Adsorption and Self-limiting Mechanisms of Trimethylaluminum and Water on Aluminum Oxide Surface
2010
Masashi Ozeki
Tomohiro Haraguchi
Keisuke Hirakawa
Kohei Uwai
Keywords:
Aluminum oxide
Adsorption
Atomic layer epitaxy
Limiting
Inorganic chemistry
Chemistry
self limiting
Correction
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