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Mechanical property control using focused ion beam patterning
Mechanical property control using focused ion beam patterning
2016
Ki-Hwan Jang
Hae-Sung Yoon
Eun-Seob Kim
Hyun-Taek Lee
Sung-Hoon Ahn
Keywords:
Nanotechnology
Focused ion beam
Materials science
Spin coating
mechanical property
Correction
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