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Hafnium Oxide Film Synthesis via Laser Ablation Plasma Ion Deposition
Hafnium Oxide Film Synthesis via Laser Ablation Plasma Ion Deposition
2006
N.M. Jordan
Ronald M. Gilgenbach
Lumin M. Wang
S. Zhu
Michael Atzmon
Y. Y. Lau
M.C. Jones
Keywords:
Dielectric
Thin film
Ion implantation
Plasma
Analytical chemistry
Energy-dispersive X-ray spectroscopy
Ion
Optics
Laser ablation
X-ray photoelectron spectroscopy
Materials science
ion deposition
Optoelectronics
Hafnium oxide
Correction
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