Improvement of manufacture technology and investigation of IPMC actuator electrodes

The actual problem of microrobotic is creating of low cost energy-efficient actuator for mobile microsystems, which are able to simulate the movement of biological objects. In this article, designed and fabricated experimental samples of ionic polymer-metal composite (IPMC) actuators are presented. Highresolution SEM was used to control the electrode thickness and structure. Method of focused ion beam was used to study the structure of IPMC. Precision sample sections were obtained using focused ion beam. Platinum electrodes consist of two distinct layers of the platinum particles differing in morphology. The distribution of the platinum particles in the depth of the membrane was investigated by X-ray microanalysis. Atomic force microscopy was used for the characterization of surface morphology of IPMC.