Microstructures and thermochromic characteristics of VO2/AZO composite films

Abstract A vanadium dioxide (VO 2 ) thin film was fabricated on a ZnO doped with Al (AZO) conductive glass by magnetron sputtering at room temperature followed by annealing under air atmosphere. The microstructures and optical properties of the thin film were studied. The results showed that the VO 2 /AZO composite film was poly-crystalline and the AZO layer did not change the preferred growth orientation of VO 2 . Compared to the VO 2 film fabricated on soda-lime glass substrate through the same process and condition, the phase transition temperature of the VO 2 /AZO composite film was decreased by about 25 °C, thermal hysteresis width narrowed to 6 °C, the visible light transmittance was over 50%, the infrared transmittances before and after phase transition were 21% and 55%, respectively at 1500 nm.