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System and method for plasma treatment with improved plasma confinement and high gas flow
System and method for plasma treatment with improved plasma confinement and high gas flow
2006
Kallol Bera
Daniel J. Hoffman
Yan Ye
Michael C. Kutney
Douglas A. Buchberger
Keywords:
Plasma
Materials science
Analytical chemistry
plasma treatment
plasma confinement
Atomic physics
Flow (psychology)
Correction
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