Reprogrammable Microelectromechanical Membrane Resonator for Logic Computation

Micromechanical computing elements have attracted much attention in modern computation. Here we propose a microelectromechanical device to perform reprogrammable fundamental 2-bit OR, XOR, XNOR and NOT logic operations. The concept of performing logic actuation is based on choosing various resonance modes of the device to obtain oscillation output. The 2 Vpp a.c. voltage input is set as binary 1 and the output a.c. voltage level reaches 47 mV. Besides, this piezoelectric microelectromechanical logical device can either compute with motion output or electrical output. The development of this electromechanical membrane-based resonator paves the way towards responsive electromechanical detectors and highly functional opto-electro-mechanical system.