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Charge trapping in capacitive MEMS structure
Charge trapping in capacitive MEMS structure
2008
M.C. van Essen
R. Cuperus
Herbert Wormeester
Horst Rogalla
Jakob Flokstra
Keywords:
Capacitive sensing
Electronic engineering
Microelectromechanical systems
Materials science
Trapping
Optoelectronics
Correction
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