Development of the modern vacuum coating technologies

V.A. Vasin,B. L. Krit,O. V. Somov,V. A. Sorokin,V. P. Frantskevich,A. V. Epel’fel’d

Development of the modern vacuum coating technologies

2016

V.A. Vasin
B. L. Krit
O. V. Somov
V. A. Sorokin
V. P. Frantskevich
A. V. Epel’fel’d

Modern physical vapor deposition and chemical vapor deposition technologies intended for the protection of surfaces of products, in particular, the pyrolytic deposition of chromium carbide coatings using organometallic compounds as precursors, are discussed.

Keywords:

Ion plating
Thin film
Hybrid physical-chemical vapor deposition
Plasma processing
Physical vapor deposition
Combustion chemical vapor deposition
Chemistry
Electron beam physical vapor deposition
Pulsed laser deposition
Metallurgy
Inorganic chemistry

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