Advances in industrial high-power excimer laser technology

The paper presents a review of the most recent achievements in the development of the industrial high power excimer lasers. The results of the development of a XeCl laser with the output energy above 900mJ and the pulse repetition frequency up to 600Hz will be demonstrated. The system performance such as energy, stability, spatial and temporal properties of the laser pulse as well as the extended maintenance cycles and finally low cost of operation in industrial applications will be discussed. Special emphasis will be placed on the design of the laser chamber and the pulsed power module, enabling the generation of a reproducible and homogeneous gas discharges which is indispensable for the required laser performance over the whole range of the laser output power.