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111 Influence of ICP-Etching Damage and Loading Condition on the Strength of MEMS Micromirror
111 Influence of ICP-Etching Damage and Loading Condition on the Strength of MEMS Micromirror
2005
Satoshi Izumi
Makoto Yamaguchi
Kunihiko Sasao
Shinsuke Sakai
Atsushi Suzuki
Yuzuru Ueda
Keywords:
Etching
Microelectromechanical systems
Composite material
Materials science
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