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DLTS Evaluation of Near-Interface Traps in Ge-MIS Structures Fabricated by ECR-Plasma Techniques
DLTS Evaluation of Near-Interface Traps in Ge-MIS Structures Fabricated by ECR-Plasma Techniques
2013
Hiroshi Okamoto
Hidehumi Narita
Shinya Sato
Takuro Iwasaki
Toshiro Ono
Yohei Otani
Yukio Fukuda
Keywords:
Electronic engineering
Plasma
Computer science
Optoelectronics
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