Broadband microstrip patch antenna on micromachined silicon substrates

M. Zheng,Q. Chen,Peter Hall,V.F. Fusco

Broadband microstrip patch antenna on micromachined silicon substrates

1998

M. Zheng
Q. Chen
Peter Hall
V.F. Fusco

A micromachined rectangular cavity-backed microstrip patch antenna has been developed on high resistivity silicon wafers. This novel patch antenna has a much reduced effective dielectric constant and wide bandwidth.

Keywords:

Antenna factor
Dielectric
Microstrip antenna
Patch antenna
Folded inverted conformal antenna
Optics
Microstrip
Electronic engineering
Mathematics
Antenna measurement
Coaxial antenna
Optoelectronics
Silicon

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