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DESIGN, FABRICATION, MODELING AND CHARACTERIZATION OF ELECTROSTATICALLY-ACTUATED SILICON MEMBRANES
DESIGN, FABRICATION, MODELING AND CHARACTERIZATION OF ELECTROSTATICALLY-ACTUATED SILICON MEMBRANES
2008
Brian C. Stahl
Keywords:
Membrane
Microfabrication
Hybrid silicon laser
Materials science
Electronic engineering
Microelectromechanical systems
Silicon
Optoelectronics
Fabrication
Etching
Correction
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