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A method for the chemical polishing of manufacturing a co-planar layer of insulator-metal on a substrate.
A method for the chemical polishing of manufacturing a co-planar layer of insulator-metal on a substrate.
1986
Klaus Dietrich Beyer
William Leslie Guthrie
Stanley Richard Markarewicz
Eric Mendel
William John Patrick
Kathleen Alice Perry
William Aaron Pliskin
Jacob Riseman
Paul Martin Schiable
Charles Lamber Standley
Keywords:
Polishing
Insulator (electricity)
Substrate (chemistry)
Planar
Composite material
Metal
Materials science
Optoelectronics
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