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Tensile Strained Selective Silicon Carbon Alloys for Recessed Source Drain Areas of Devices
Tensile Strained Selective Silicon Carbon Alloys for Recessed Source Drain Areas of Devices
2006
Matthias Bauer
Doran Weeks
Yangting Zhang
Vladimir Machkaoutsan
Keywords:
Carbon
Electronic engineering
Composite material
Ultimate tensile strength
Materials science
Silicon
Correction
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