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Inorganic Thin Film Passivation Layer Fabricated by Plasma Enhanced Chemical Vapor Deposition
Inorganic Thin Film Passivation Layer Fabricated by Plasma Enhanced Chemical Vapor Deposition
2013
Bum-Hee Lee
Dong Hee Park
Chang-Kyu Jin
Tae-Hwan Kim
Won Kook Choi
Keywords:
Thin film
Ion plating
Hybrid physical-chemical vapor deposition
Passivation
Combustion chemical vapor deposition
Environmental chemistry
Electron beam physical vapor deposition
Plasma processing
Plasma-enhanced chemical vapor deposition
Inorganic chemistry
Materials science
Chemical engineering
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