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Lithography of l8Onm design rule for lGbit DRAM
Lithography of l8Onm design rule for lGbit DRAM
2017
Dong-Seok Nam
Jung-Hyeon Lee
Chang-Hwan Kim
Seong Woon Choi
Hoyoung Kang
Keywords:
Lithography
Multiple patterning
Electronic engineering
Dram
Materials science
Optoelectronics
Computer science
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