Reactive laser deposition of high quality YBaCuO and ErBaCuO films
1996
RE 1 Ba 2 Cu 3 O 7-δ (RE = Er or Y) superconducting films were fabricated by reactive laser deposition, in situ, on YSZ(100), SrTiO 3 (100) and Si(001), under various conditions. A complete XRD investigation showed that the films grown with high substrate temperatures (T s > 740°C) combined with low fluences (1.5 J / cm 2 < 2 J / cm 2 ) and laser repetition rate (4 Hz) have the best structural characteristics, very good electrical and magnetic properties.
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