M ultiphysics FEM Simulations Approach for Development of MEMS Heat Generator

2006 
Introduction: Accurate fluid temperature control in microfluidic channels is a requirement for many lab-on-chip and micro-reactors, especially in biotechnology and in chemistry where most process are highly temperature sensitive. Frequent applications utilize precise, controlled and localized heating to enable the required process taking place in microchamber closely coupled to the heating source.
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