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Low Leakage SOIMOSFETs Fabricated Using a Wafer Bonding Method
Low Leakage SOIMOSFETs Fabricated Using a Wafer Bonding Method
1989
Makoto Hashimoto
A. Ogasawara
Muneharu Shimanoe
Akira Nieda
H. Satoh
A. Yagi
Takeshi Matsushita
Keywords:
Composite material
Leakage (electronics)
Wafer bonding
Materials science
Optoelectronics
low leakage
Correction
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