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In-Situ Doped CMOS Polysilicon Thin Film Transistors
In-Situ Doped CMOS Polysilicon Thin Film Transistors
1995
Byung-Hyuk Min
Cheol-Min Park
Byung-seong Bae
Min Koo Han
Keywords:
Thin-film transistor
Electronic engineering
Doping
CMOS
Materials science
Optoelectronics
In situ
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