X-선을 활용한 차세대 정밀 가공 기술 연구

At the micro scale, there are many machining technologies for fabrication of precise devices and structures. However, as industries' demands for precision and accuracy are getting higher, the conventional machining method is no more available and a novel methode to satisfy these needs strictly is necessary. We propose next generation micro-machining technology using synchrotron radiation x-ray. Compared to the existing other method, it has excellent features such as high accuracy, low side-wall roughness, variety of material and subminiature feature size. We developed x-ray machining tools and equipment to be able to apply actually in industry. For this study, we have investigated optimum x-ray machining facility and process condition. In addition, we fabricated several precision device like vacuum electron device, micro-mold and other micro structures.