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Effect of MgTa addition on the piezoelectric response of aluminum nitride thin films
Effect of MgTa addition on the piezoelectric response of aluminum nitride thin films
2019
Sri Ayu Anggraini
Masato Uehara
Kenji Hirata
Hiroshi Yamada
Morito Akiyama
Keywords:
Piezoelectricity
Aluminium
Thin film
Materials science
Nitride
Composite material
Correction
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