Bis(diaryliodonium) perfluorosulfonimide zwitterions as potential photo acid generators

Hua Mei,Darryl D. DesMarteau

Bis(diaryliodonium) perfluorosulfonimide zwitterions as potential photo acid generators

2014

Hua Mei
Darryl D. DesMarteau

Abstract Three examples of bis(diaryliodonium) perfluorosulfonimide (BDI-PFSI) zwitterions have been prepared as a potential new class of ionic photo-acid generators for chemically amplified photoresist formulations.

Keywords:

Photoresist
Ionic bonding
Organic chemistry
Inorganic chemistry
Chemistry

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