Utilization of Neutral Particle Beam in Ion Microanalyzer

A separating apparatus for the primary ion beam and the neutral particle beam which is attached to Ion Microanalyzer(IMA), is developed.And the characteristics of the neutral beam, such as the sputtering yields, the secondary ion yields and the beam density, are examined.The sputtering yields and the secondary ion yields of the oxygen neutral particle beam are the same as those of the O2+ion beam.The neutral particle beam density is depending-on the discharging condition of a hollow cathode ion gun. In addition, the analysis method using the neutral particle beam is discussed.This method not affected by the charge built up phenomena of a sample and is suitable for obtaining the stable mass spectra of the insulators such as glasses or organic materials.