Efficient uncertainty analysis of waveguide-mode resonant optical filters

The performance of optical filters with resonant waveguide gratings is predicted numerically, assuming random fluctuations of various design variables. Specifically, we derive stochastic models based on polynomial-chaos expansions (PCEs), by employing a stochastic collocation (SC) approach that exploits the rigorous coupled-wave analysis (RCWA) deterministic solver. The statistical moments of the filters' spectral response are obtained for transverse-electric (TE) polarization, and compared against reference results from the Monte-Carlo (MC) method.