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Low-temperature Microwave Annealing Process for Ge MOSFETs
Low-temperature Microwave Annealing Process for Ge MOSFETs
2013
Y.-J Lee
S. S. Chuang
C.-I. Liu
F.-K. Hsueh
P.-J. Sung
C. T. Wu
C. H. Lai
Y.M. Wan
M. I. Current
T.-Y. Tseng
Keywords:
Nuclear magnetic resonance
Annealing (metallurgy)
Microwave
Materials science
microwave annealing
Optoelectronics
Correction
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