Effect of N2 to C2H2 ratio on r.f. plasma surface treatment of austenitic stainless steel

Abstract Adding C 2 H 2 gas to nitrogen gas during r.f. plasma processing has significant influence on the properties of 304 austenitic stainless steel. The elemental depth profiles of the compound layer were investigated by glow discharge optical spectroscopy. Different treatment gas compositions of N 2 /C 2 H 2 mixtures (0–100% in steps of 10 or 5% in some cases) have been investigated. The total gas pressure during the plasma processing was 8.4×10 −2 mbar. The sample temperature was approximately 550 °C with an insignificant variation for different gas compositions. A high rate of diffusion of carbonitriding has been obtained without initial sputter removal of the surface oxide layer, which demonstrates that the surface oxide layer does not play a crucial role during r.f. plasma carburizing and carbonitriding of stainless steel. The nitrogen concentration and the compound layer thickness increase, when 10% of C 2 H 2 is added. With further increase in the C 2 H 2 ratio, they decrease again gradually. The carbon depth profiles for the same samples show lower concentration and opposite tendency with respect to the nitrogen content. X-ray diffraction was used to characterize the microstructure of the compound layers. Fe 2 N, Fe 3 N, CrN, nitrogen-expanded austenite (γ n ) and carbon-expanded austenite (γ c ) phases are detected. The relative proportions of the phases are critically dependent on the N 2 /C 2 H 2 ratio. Depending on the N 2 /C 2 H 2 ratio, the microhardness value increases by a factor between 2 and 6. The carbonitrid layer exhibits a corrosion resistance better than pure nitrided and carburized layers.