Enhancing Sensitivity Using Electrostatic Spring in Coupling Mode-Localized Mems Accelerometer

This paper reports a novel designed electrostatic spring structure that use to significantly enhance the sensitivity of mode-localized resonant accelerometer (ML-RXL) without increasing the device size. Moreover, the sensitivity can be flexibly adjusted by the bias voltage. Finite element method (FEM) simulation results presented demonstrate that the sensitivity of ML-RXL is increased from 59.322 AR/g to 96.034 AR/g with a linear operating range of 0.3g by applying the bias voltage of 30V.