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Impact of Low Thermal Budget Dual Oxidation on Tunnel Oxide Characteristics
Impact of Low Thermal Budget Dual Oxidation on Tunnel Oxide Characteristics
1997
Kyong Moo Mang
Jonghan Kim
Wang Chul Shin
Chul-Ho Shin
S.T. Ahn
Keywords:
Thermal
Oxide
Composite material
Electrical engineering
Engineering
Engineering physics
Correction
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