NbN nanowire superconducting single photon detectors fabricated on MgO substrates

We report on the fabrication and characterization of high performance nanowire superconducting single photon detectors (SSPD) on MgO substrates. The deposition of the superconducting material (NbN) has been performed by magnetron sputtering at 400°C. This deposition temperature is low enough to be compatible with the fabrication on traditional optical materials like GaAs. First, SSPD meanders covering a surface of 5 × 5 µm2 were characterized. We measured quantum efficiencies up to 20% at 1300 nm. Then, we used a straight 250 µm-long NbN nanowire to perform a spatially resolved measurement of the efficiency. Both efficiency dips and peaks were observed. The dips were correlated to lithographic defects, as confirmed by scanning electron microscopy. Conversely, no evidence of a lithographic origin of efficiency peaks was found.