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Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers
Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers
2019
Lutz Ehrig
Bert Kaiser
Hermann Schenk
Michael Stolz
Sergiu Langa
Holger Conrad
Harald Schenk
Andreas Männchen
Tobias Brocks
Keywords:
Microelectromechanical systems
Silicon
Materials science
Optoelectronics
Correction
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