SYNTHESIS AND CONDUCTING PROPERTIES OF YSZ THIN FILMS

The optical properties of YSZ thin films synthesized by microwave plasma CVD process have been examined. The transmittances in the range of 230-900nm wavelength are about 72%. The technique of ac impedance was used to measure the conductivity of YSZ films in the range of teemperature from 100-700℃. Low frequence friction for samples was determined by means of reverse rotation pendulum method. Combining the results both conductivity and internal friction measurements, Authors have discussed that the change of conductivity is related to the excitation of oxygen vacancies and the atomic relaxation occured at crystal boundary.