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Correlation between Contact Angle and Surface Roughness of Silicon Carbide Wafers
Correlation between Contact Angle and Surface Roughness of Silicon Carbide Wafers
2021
Jung-Gon Kim
Woo Sik Yoo
Woo-Yeon Kim
Won-Jae Lee
Keywords:
Wafer
Contact angle
Silicon carbide
Composite material
Surface roughness
Materials science
Correction
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