Synthesis of Tix-CuyNz thin film: Electronic bond structure

We report the synthesis of Tix-CuyNz (here, x, y, z are integer) thin film deposited by magnetron plasma. In x-ray photoelectron spectrum (XPS) of the surface of the film shows shake up shake up satellite peak of Ti 2p, Cu 2p. The stoichiometric value of Ti, Cu and N in the deposited film is determined by XPS de-convolution method. Satellite peak is reduced at 1 µm depth and a drastic chemical shift is observed. The relative intensity of Cu, Ti and N is increased with respect to the same obtained at the surface layer. Optical band gap differ by 1.87 eV and 1.70 eV at surface and 1 µm depth, respectively. Current voltage statistic has been studied with respect to the applied voltage across the film surface as well as bulk.