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Surface planarisation of LTCC for high performance thin-film applications
Surface planarisation of LTCC for high performance thin-film applications
2006
Jarkko Tuominen
Kari Kautio
Manu Lahdes
Kari Rönkä
Tuomo Jaakola
Jaakko Lenkkeri
Keywords:
Lapping
Thin film
Polishing
Optoelectronics
Materials science
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