Display 응용을 위한 Nano Template 공정 최적화 및 CNT 성장연구

In this paper, established process of AAO template produce and analysed and observed being growth CNT(Carbon nanotube) after processing of CVD with FE-SEM and Raman spectrum. AAO template analysed four kinds of substrate about Al/Si, Al/SiO₂/Si, Al/Ni/Ti/Si, Al sheet, and then make CNT grow using CVD. The Size of manufactured pore adjusted approximately from 30 ㎚ to 70 ㎚ and length adjusted from 300 ㎚ to 1 ㎛. Diameter of CNT was 40 ㎚ and length grow about 1 ㎛.