Si Nanocrystal Split Gate Technology Optimization for High Performance and Reliable Embedded Microcontroller Applications

Sung-taeg Kang,Jane A. Yater,Cheongmin Hong,James Shen,Nicole Ellis,Matthew T. Herrick,Horacio P. Gasquet,W. Malloch,Gowrishankar L. Chindalore

Si Nanocrystal Split Gate Technology Optimization for High Performance and Reliable Embedded Microcontroller Applications

2008

Sung-taeg Kang
Jane A. Yater
Cheongmin Hong
James Shen
Nicole Ellis
Matthew T. Herrick
Horacio P. Gasquet
W. Malloch
Gowrishankar L. Chindalore

In this paper, the authors present the performance characteristics of such a silicon nanocrystal split gate bitcell and report an optimal bitcell process and integration scheme for memory arrays.

Keywords:

Non-volatile memory
CMOS
Nanocrystal
Microcontroller
Materials science
Silicon
Electronic engineering
silicon nanocrystal
nanostructured materials
Fabrication
Nanotechnology

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