Semiconductor substrate based arrangement for an RFID device, the RFID device and method of manufacturing such a semiconductor substrate based arrangement

The invention relates to a semiconductor substrate based system (10) for an RFID device (12), particularly for an RFID transponder, comprising a semiconductor substrate (14) and one on the semiconductor substrate (14) constructed electronic circuit arrangement (18). It is contemplated that the semiconductor substrate based assembly (10) further comprises a built also on the semiconductor substrate (14) a thin film battery (22) to power the RFID device (12). The invention further relates to an RFID device (12) with a corresponding semiconductor substrate based assembly (10) and a method for producing a corresponding semiconductor substrate based assembly (10).